• MEMS, BioMEMS, and Optical MEMS technology

 

Micromachining and MEMS technology utilizes the fabrication technology of integrated circuits to produce complex structures, devices and systems on a scale of micrometers. MEMS technology has been widely used to to convert real-world signals from one form of energy to another, such as microsensors, microactuators, and microsystems. The GNS scientists research development and commercialization of monolithically integrated MEMS technologies, devices, and systems based on silicon integrated circuit technology, such as scalable mechanical, microfluidic, chemical & biological, thermal, electrical & magnetic, and optical systems.